A MEMS gyroscope (also called a MEMS angular rate sensor) is a miniature silicon sensor that measures angular velocity — the rate of rotation around an axis — using the Coriolis effect on a vibrating proof mass. It outputs an electrical signal proportional to rotation in degrees per second (°/s), with no spinning rotor. Compact, low-power, and reliable, MEMS gyroscopes are the core rotation sensor in drones, vehicles, robotics, and inertial navigation systems.
Was ist ein MEMS-Gyroskop?
A MEMS gyroscope is an inertial sensor that detects how fast an object rotates around one or more axes, measured in degrees per second (°/s) or radians per second (rad/s). Built with micro-electro-mechanical systems (MEMS) technology, it replaces the spinning rotor of a traditional gyroscope with a tiny vibrating silicon structure — making it small, low-cost, and highly reliable. It is also known as a MEMS angular rate sensor, because “angular rate” is simply another term for the rate of rotation it measures.
Unlike GPS, a MEMS gyroscope needs no external signal: it senses rotation directly, which makes it essential for navigation and stabilization when satellite signals are weak or unavailable.
How Does a MEMS Gyroscope Work?
A MEMS gyroscope works on the Coriolis-Effekt:
- Vibrating proof mass — a micro proof mass is driven to vibrate in a fixed direction.
- Rotation applied — when the sensor rotates, the mass experiences a Coriolis force perpendicular to both its vibration and the axis of rotation.
- Deflection detection — this tiny deflection is sensed by capacitive (or piezoelectric) electrodes.
- Signal conversion — the displacement is converted into an electrical signal proportional to angular velocity.
The Coriolis acceleration is expressed as a = 2(Ω × v), where Ω is the angular velocity of the rotating frame and v is the velocity of the vibrating mass. This relationship is the physical basis of every MEMS gyroscope.
Internal Structure
A typical MEMS gyroscope contains:
| Komponente | Funktion |
|---|---|
| Drive mass | Generates controlled vibration |
| Sense mass | Detects Coriolis-induced displacement |
| Suspension springs | Maintain stable oscillation |
| Electrodes | Convert motion into an electrical signal |
| ASIC circuit | Processes and outputs the angular rate |
This micro-scale architecture is fabricated with silicon wafer processes similar to semiconductor manufacturing.
What Are the Types of MEMS Gyroscope?
MEMS gyroscopes differ mainly by their vibrating structure and control method, with a clear trade-off between cost and precision:
| Typ | Prinzip | Key strength | Typical applications |
|---|---|---|---|
| Vibratory | A vibrating mass detects rotation via the Coriolis effect | Most common, compact, low-cost | Smartphones, gaming controllers, drones |
| Tuning-fork | Two counter-vibrating beams; rotation unbalances them | Better noise rejection and stability | Automotive stability, industrial sensors, IMUs |
| Ring | Ring-shaped vibrating structure using standing-wave patterns | High precision, low drift, long-term stability | Aerospace navigation, defense |
| Closed-loop | Feedback control keeps vibration amplitude constant | Highest accuracy, real-time error correction | Autonomous vehicles, precision industrial control |
In short: vibratory types are low-cost and widely used; tuning-fork types add stability; ring gyros deliver high precision; and closed-loop designs offer the best accuracy.
MEMS Gyroscope vs Traditional Gyroscope
| Merkmal | MEMS-Gyroskop | Mechanical Gyroscope |
|---|---|---|
| Größe | Micro-scale | Groß |
| Power | Very low | Hoch |
| Kosten | Niedrig | Hoch |
| Durability | High (solid-state) | Mechanical wear |
| Start-up | Instant | Slow |
| Integration | IC-level, easy | Complex |
MEMS technology replaces spinning rotors with vibrating silicon structures. For how modern solid-state gyros compare and why they are replacing older designs, see how solid-state gyros work. For an optical alternative used in higher-precision systems, see fiber optic gyro vs MEMS gyro.
Key Performance Parameters
When selecting a MEMS gyroscope, these are the parameters that matter most:
| Parameter | Beschreibung | Typischer Bereich |
|---|---|---|
| Stabilität der Vorspannung | Output drift over time (lower is better) | 5–50 °/h |
| Noise density | Random signal noise (angle random walk) | 0.005–0.1 °/s/√Hz |
| Messbereich | Maximum angular velocity it can measure | ±250 to ±2000 °/s |
| Bandbreite | Response speed | 50–500 Hz |
| Scale-factor stability | Consistency of output-to-rotation ratio | Application-dependent |
Industrial and navigation-grade MEMS gyroscopes focus on improving bias stability and reducing noise, which are the two parameters that most affect long-term navigation accuracy.
What Is a MEMS Gyroscope Used For?
- Unterhaltungselektronik — screen rotation, gesture control, image stabilization, VR/AR headsets
- Automotive — electronic stability control (ESC), yaw-rate detection, ADAS and autonomous driving
- Luft- und Raumfahrt & Verteidigung — UAV navigation, aircraft stabilization, missile guidance in GPS-denied conditions
- Industrial robotics — motion control, precision positioning, factory automation
- Marine — dead-reckoning and orientation for submarines, ROVs, and autonomous underwater vehicles
SkyMEMS MEMS gyroscopes include the MGA1000 MEMS-based gyroscope, the MGS1000 single-axis MEMS gyro, and the IMU100 MEMS angular rate sensor. Browse the full MEMS gyro range.
Häufig gestellte Fragen
What is a MEMS gyroscope? A MEMS gyroscope is a miniature silicon sensor that measures angular velocity (rate of rotation) using the Coriolis effect on a vibrating proof mass, with no spinning rotor.
Is a MEMS gyroscope the same as a MEMS angular rate sensor? Yes. A MEMS angular rate sensor is a MEMS gyroscope — both measure the rate of rotation around an axis, expressed in degrees per second.
How does a MEMS gyroscope work? A vibrating proof mass experiences a Coriolis force when rotated; the resulting deflection is sensed capacitively and converted into an electrical signal proportional to angular velocity.
What are the types of MEMS gyroscope? The main types are vibratory (low-cost, widely used), tuning-fork (better stability), ring (high precision), and closed-loop (highest accuracy).
What is the difference between a MEMS gyroscope and a mechanical gyroscope? A MEMS gyroscope uses a vibrating silicon structure — small, low-power, low-cost, and reliable — while a mechanical gyroscope uses a spinning rotor that is large, costly, and subject to wear.
What is a MEMS gyroscope used for? Consumer electronics, automotive stability control, UAV and aerospace navigation, industrial robotics, and marine dead-reckoning.
