High end closed-loop MEMS accelerometer chip, specially designed for vibration measurements: seismic monitor, micro-vibration monitoring, etc.

  • Range: ±2g~±30g, Excellent Bias Stability
  • Output: Differential Output / Single-Ended Output
  • Very Low Noise: 1.2μg/√Hz for ±2g Range (typical)
  • Input Power Supply: 4.75~5.25V
  • Embedded Self-Test Function and Temperature Sensor
  • Embedded Precision Reference Voltage
  • Shock Survivability: 6000g, Vibration Resistance
  • Wide Operating Temperature Range: -40~+125°C

Brief Introduction

MA1000A seismic accelerometer is the best high performance capacitive MEMS accelerometer adopting closed loop structure, it uses high performance ASIC and MEMS sensor to build closed-loop system, and it enjoys excellent performance with low noise, dynamic range, non-linearity, repeatability, temperature drift and shock resistance. MA1000A guarantees confident and accurate vibration measurement in rugged environments.

MA1000A accelerometer also has embedded self-test function, temperature sensor for compensation and built-in high precision reference voltage, which ensures MA1000A to be the top level of accelerometer around the world. Using tiny sealed LCC20 encapsulation (9*9mm), MA1000A has been widely used in Seismic Monitor, Micro-vibration Monitoring, Engineering Geophysical Exploration, Inertial Navigation, Structure/Building Monitoring, Surface Wave Detection, and Platform Stability, etc. Each accelerometer is fully tested and qualified, and its super reliability and excellent performance gains customers’ high praise.


Technical Specifications

ParameterMA1000AUnitResetPower Supply (Vcc)Accelerometer Output

MA1002A MA1003A MA1005A MA1010A MA1030A
Range ±2 ±3 ±5 ±10 ±30 g
Non-linearity (full range) 0.1 0.1 0.1 0.1 0.1 %
Frequency Response (±5% bandwidth) >100 >100 60 60 60 Hz
Frequency Response (±3dB bandwidth) >1000 >1000 200 200 200 Hz
Noise Spectral Density(@100Hz) 1.2 1.5 1.8 2.5 3 μg/√Hz
Bias Temperature Coefficient (maximum) 0.3 0.3 0.3 0.3 0.3 mg/℃
Bias Stability (1hour, 1σ, 1s) 0.05 0.05 0.05 0.05 0.05 mg
Scale Factor 1800 1200 720 360 120 mV/g
Scale Factor Temperature Coefficient 50 50 50 50 50 ppm/℃
Scale Factor Stability 50 50 50 50 50 ppm
Scale Factor Repeatability 50 50 50 50 50 ppm
Axis misalignment
Input Axis Misalignment (Kp,Ko) 10 (max.) mrad
Self Test
Frequency (Square wave output) 19 Hz
Duty cycle 50 %
Amplitude (Peak to peak) 0.28 0.55 0.55 0.55 0.55
STEN Input Threshold Voltage (High level is valid) 0.8 (min.) Vcc
Temperature Sensor
Output Voltage (@25°C) 2.47 V
Sensitivity 8.3 mV/℃
Output Current Load 20 (max.) μA
Output Capacitive Load 30 (max.) pF
RSTN Input Threshold Voltage 0.2 (max. , Low level is valid) Vcc
Input Voltage 5 V
Running Current Consumption 5.4 mA
Startup Time (Turn on or RSTN pull-up) 10 ms
Output Voltage ±3.6 (full range differential output) V
Resistance Load 10 (min.)
Capacitive Load 30 (max.) pF

Typical Application

MA1000A capacitive MEMS accelerometer is a high end MEMS accelerometer, specially designed for vibration measurements. Thanks to its closed loop structure, low noise, resistance to high shocks and insensitivity to harsh environments, MA1000A assures confident and accurate vibration measurements in rugged environments, which has been widely used in the following fields:

Seismic Monitoring

– Instruments for Seismic Prevention


Railway Technology

– Active suspension system

– Bogie monitoring

– High-speed trains

– Track monitoring system

– Vibration monitoring system

Test & Measurement

– Automotive testing

– Aero flight testing

– Down borehole testing

– Flutter testing

Monitoring & Control

– Vibration monitoring

– Wind turbine

MA1000A Accelerometer widely used in Seismic monitoring

Earthquake early warning systems use earthquake science and the technology of monitoring systems to alert devices and people when shaking waves generated by an earthquake are expected to arrive at their location. The seconds to minutes of advance warning can allow people and systems to take actions to protect life and property from destructive shaking.

Accelerometers are usually used where precision records of smaller seismic events are required. SkyMEMS accelerometers provides low noise and low frequency accelerometers, it can accurately measure the vibration changes, which are widely used in the seismic monitoring systems.

MA1000A Accelerometer widely used in high-speed railway

As one of the new four great inventions, Chinese high-speed railway provides high speed, stable, comfort services for the passengers. has formed a high-speed railway technology platform and technology system with independent intellectual property rights.

SkyMEMS Accelerometers are based on silicon MEMS capacitive sensors, which offer higher performances in terms of size, power, reliability, long-term stability, signal to noise and robustness.

SkyMEMS Accelerometers have been widely used in the high speed train, they are used to monitor several types of mechanical motions such as inertial force (acceleration), tilt (inclination), vibration and shock.

MA1000A Accelerometer widely used in inertial navigation system

Inertial navigation system (INS) is a system that composed of a computer, motion sensors (accelerometers), rotation sensors (gyroscopes) and occasionally magnetic sensors (magnetometers), to continuously calculate the position, the orientation, and the velocity of a moving object without the need for external references. It is used on vehicles such as ships, aircraft, submarines, guided missiles, and spacecraft.

SkyMEMS accelerometers have been widely used in the inertial navigation systems, including IMU, AHRS, MRU, etc. It enjoys high performance and high stability in harsh environment.


Product Advantages

Why Selecting MA1000A capacitive MEMS accelerometer?

MA1000A capacitive MEMS accelerometer is designed and produced by SkyMEMS, it enjoys high performance and accuracy, and high reliability with competitive price. It is a popular accelerometer chip sensor in the market, which has the main following advantages:

  1. High Accuracy, High Performance and Powerful Functions

– Range: ±2g~±30g, Excellent Bias Stability

– Output: Differential Output / Single-Ended Output

– Very Low Noise: 1.2μg/√Hz for ±2g Range (typical)

– Input Power Supply: 4.75~5.25V

– Embedded Self-Test Function and Temperature Sensor

– Embedded Precision Reference Voltage

– Shock Survivability: 6000g, Vibration Resistance

– Wide Operating Temperature Range: -40~+125°C

MA1000A MEMS accelerometer adopts advanced production craft, and fully calibrated, which assured that our products have real actual precise and perfect performance.

  1. Aerospace Level Reliability, 12-step Strictest Quality Control

We have advanced product test team and measurement equipment, and we cherish the quality as the life of the company, all our products must pass the strictest quality control procedures, our unique 12-step quality control assures our products enjoy top level quality.

  1. Competitive Price, ODM supported

With strict cost control and massive production, we can provide the most competitive cost-effective prices, and we have abundant ODM service experience for customers around the world, that is why we can build up long term win-win cooperation with our customers.

  1. Successful Applications in 10+ Fields, 1000+ Customers are Using

We are continuously focusing on MEMS measurement & control technologies, and have developed the most advanced MEMS accelerometer MA1000A. and MA1000A has been widely used in Early Earthquake Warning System, Structural Health Monitoring, High-speed Train, Vibration Monitoring System, Inertial Navigation System, Platform Stability, etc. and now more than 1000 customers are using our MEMS accelerometer around the world.

  1. World-class Production Line, Fast Delivery

We have the world class production line to assure that the production procedures are scientific, precise, and normative, which also can assure our products to be fast delivered.

  1. Service with Heart, Professional Technical Support

We have the professional technical support engineer team, which can provide 24-hour technical support and excellent after-sale service.

Serving customers with heart is the principle of SkyMEMS, Customer demand is the fundamental driving force of our development.

We treat our customers with heart, customers’ satisfaction is the direction and target of SkyMEMS. Through continuously technology innovation and service upgrading, we will realize win-win cooperation with customers.


Q: Why does MA1000A MEMS accelerometer is so hot selling product?

A:  1) MA1000A MEMS accelerometer is very mature MEMS accelerometer chip, which has been widely used in Seismic Monitor, Micro-vibration Monitoring, Engineering Geophysical Exploration, Inertial Navigation, Structure/Building Monitoring, Surface Wave Detection, and Platform Stability, etc., for many years, and now the sold qty can reach 20k per year

2) since we produce MA1000A in big qty, so MA1000A MEMS accelerometer can enjoy ultra-cost-effective, which assure that it can be widely used.

5) MA1000A MEMS accelerometer provides the most reliability, its quality has been proven by the leading companies in China.

Q: about MA1000A self-test, whether it is possible to do it in the frequency other than 19Hz?

A: for the self-test frequency is fixed in ASIC of MA1000A, so it cannot be changed, if still wanting to modify the self-test frequency, the only way is to modify the ASIC, but this cost is huge, not recommended.

Q: How accurate the self-test is in response to temperatures change. if the presumed peak to peak amplitude (0.28g) would change by changing temperature.?

A: the error will be around 2% in theoretically to temperature change.

Q: About temperature effect on bias and scale factor(sensitivity), whether these two items are compensable or not. Whether the numbers mentioned at data sheet can be used to compensate temperate effect on bias and sensitivity?

A: MA1002A is analog accelerometer, all its compensation is done through external MCU. In normal situation, you can do 2nd order and 3rd order, and after the compensation, the features may be better 5~10times

Q: About temperature effect on bias and scale factor(sensitivity), if those number mentioned for bias drift and sensitivity drift can be used for compensation, please complete them with their sign (+ or -)?

A: each chip’s bias drift and sensitivity data can be used to do the compensation, in normal situation, this needs you to do the calibration according to the whole system requirements. Cause the whole system may have other component ADC’s composite temperature drift.

Of course, for our chip, we will fully test them before leaving factory, but because the system errors, these data may not be able to adjust your system into the most optimized status.

Q: What does the MEMS accelerometer actually measure?

A: An accelerometer is an electromechanical device that measures acceleration forces. These forces may be static, like the constant force of gravity pulling at our feet, or they could be dynamic – caused by moving or vibrating the accelerometer. They developed MEMS (micro electromechanical systems) accelerometers.

Q: What is MEMS accelerometer?

A: MEMS stands for micro electro mechanical system and applies to any sensor manufactured using microelectronic fabrication techniques. These techniques create mechanical sensing structures of microscopic size, typically on silicon. When coupled with microelectronic circuits, MEMS sensors can be used to measure physical parameters such as acceleration. There are two types of MEMS accelerometers: variable capacitive and piezoresistive. Variable capacitive (VC) MEMS accelerometers are lower range, high sensitivity devices used for structural monitoring and constant acceleration measurements. Piezoresistive (PR) MEMS accelerometers are higher range, low sensitivity devices used in shock and blast applications.

Q: How does a MEMS accelerometer sensor work?

A: An accelerometer is an electromechanical device that measures both static (gravity) and dynamic (motion or vibration) accelerations. The development of MEMS technology has revolutionized the original accelerometer applications, making them smaller, lower power and more accurate. MEMS accelerometers today may be found not only in industrial and mobile applications, but also in safety critical aeronautical instruments, tactical guidance systems.

Most accelerometers are Micro-Electro-Mechanical Sensors (MEMS). The basic principle of operation behind the MEMS accelerometer is the displacement of a small proof mass etched into the silicon surface of the integrated circuit and suspended by small beams.

Q: How about the delivery time?

A: for our standard model, if we have them in stock, only need 2~3days to re-test before shipping, if it is out of stock, then need around 2 weeks to arrange the production and tests. For the ODM electronic product, if needing to modify the structure, it will need around 3~4 weeks to arrange the production and tests.

Q: How to arrange the payment?

A: about the payment, please pay to our company account, the beneficiary’s name: NANJING SKY MEMS TECHNOLOGY CO., LTD.  And our email is only to contact with u formally. To notice this to avoid the loss.