Single/Dual/Triaxial MEMS Capacitive Accelerometer Sensor, ultra-low noise: 1ug, dynamic range: 110dB, widely used in vibration monitoring, etc.

  • Closed Loop Structure MEMS Capacitive Accelerometer
  • Range: ±2g, ±5g, ±10g, ±30g, Excellent Bias Stability
  • Dynamic Range: ≥110dB,
  • Bandwidth: MAS3012-2 ≥1KHz (Typical Value, -3dB)
  • Low Noise: MAS3012-2≤1.0μgrms/√Hz
  • Non-linearity: 0.1%FS (Full Range)
  • Extremely Reliable in Harsh Environment
  • Wide Operating Temperature Range: -40~+85ºC

Brief Introduction

MS3012 single/dual/tri-axial MEMS accelerometer sensor is one type of high-performance vibration monitoring sensor base on MEMS technologies. It adopts 7~24V or 5V±3% power supply, integrate X-Y-Z trial axes and self test function, it adopts high performance accelerometer, the dynamic range can reach 110dB.

MS3012 accelerometer sensor has passed the strictest tests, it enjoys excellent performance in noise, dynamic range, non-linearity, repeatability, temperature drift, shock proof, etc. this product is an ideal option for seismic monitor, vibration monitoring, high speed train/metro train, test platform of vibration and shocking, structure health monitoring, etc.


Technical Specifications

ParameterMS3012-02MS3012-05MS3012-10MS3012-30UnitParameterValueRemarksAccelerometer OutputElectrical SpecsEnvironment PerformancePhysical Specs

Range ±2 ±5 ±10 ±30 g
Zero Bias ±20 ±20 ±20 ±20 mV
Scale Factor Sensitivity  (Differential Output ) 1800±20 720±20 360±20 120±20 mV/g
Bandwidth (-3dB) 1000 200 200 200 Hz
Output Noise 1 1.5 3.5 4 μg/√Hz
Non-linearity 0.1 0.1 0.1 0.1 %
Cross-axes Influence 3 3 3 3 %
Bias Temperature   Coefficient ±0.2 ±0.2 ±0.2 ±0.2 mg/ ºC
Scale Factor Temperature Coefficient 120 120 120 120 ppm/ ºC
Self Test Function
Frequency 19Hz Square wave output
Duty Ratio 0.5
Amplitude 0.8g Peak value
Single/Trixial Self Test  Threshold Voltage 4Vmin  5Vmax High level is valid
Output Voltage  (Differential Output ) 0~ ±3.6V             OutP :0.5~4.5V OutN: 0.5~4.5V OutP, OutN full range output
Working Voltage 7~24V or 5V±3%
Working Current ≤25mA Three axes
Startup Time 20ms
Operating Temperature -40~+85°C
Storage Temperature -55~+125°C
Shock Resistance 6000g
Dimensions 37×30×25mm
Casing aluminum alloy
Weight 30grams  (without lines),76 grams (with lines)

Typical Application

MS3012 single/dual/tri-axial MEMS accelerometer sensor is a high-end MEMS accelerometer sensor, specially designed for earthquake and vibration monitoring. Thanks to its up to 110dB dynamic range, lower noise, resistance to high shocks and insensitivity to harsh environments, MS3012 accelerometer assures confident and accurate vibration measurements in rugged environments, which has been widely used in the following fields:

– High-speed Train / Metro Train

– Early Earthquake Warning System

– Structural Health Monitoring

– Vibration Monitoring System

– Industrial Process Control

MS3012 accelerometer widely used in high-speed train

As one of the new four great inventions, Chinese high-speed railway provides high speed, stable, comfort services for the passengers. has formed a high-speed railway technology platform and technology system with independent intellectual property rights.

SkyMEMS Accelerometers are based on silicon MEMS capacitive sensors, which offer higher performances in terms of size, power, reliability, long-term stability, signal to noise and robustness.

SkyMEMS Accelerometers have been widely used in the high-speed train, they are used to monitor several types of mechanical motions such as inertial force (acceleration), tilt (inclination), vibration and shock.

MS3012 accelerometer widely used in Seismic monitoring

Earthquake early warning systems use earthquake science and the technology of monitoring systems to alert devices and people when shaking waves generated by an earthquake are expected to arrive at their location. The seconds to minutes of advance warning can allow people and systems to take actions to protect life and property from destructive shaking.

Accelerometers are usually used where precision records of smaller seismic events are required. SkyMEMS accelerometers provides low noise and low frequency accelerometers, it can accurately measure the vibration changes, which are widely used in the seismic monitoring systems.

MS3012 accelerometer widely used in structural inspection

The development of safety systems and continuous monitoring of buildings, bridges, railways is very important to achieve these purposes. MEMS accelerometer sensors are used in structural inspection. If the high building vibration signal is abnormal, the monitoring system can get the signal and send out alarm.

SkyMEMS accelerometers provides low noise and low frequency accelerometers, it can accurately measure the vibration changes, which are widely used in the structural inspection monitoring systems.


Product Advantages

Why Selecting MAS3012 1ug Single/Dual/Triaxial MEMS Capacitive Accelerometer?

MS3012 accelerometer is designed and produced by SkyMEMS, it enjoys high performance and accuracy, and high reliability with competitive price. It is a popular accelerometer sensor in the market, which has the main following advantages:

  1. High Accuracy, High Performance and Powerful Functions

– Closed Loop Structure MEMS Capacitive Accelerometer

– Range: ±2g, ±5g, ±10g, ±30g, Excellent Bias Stability

– Dynamic Range: ≥110dB,

– Bandwidth: MAS3012-2 ≥1KHz (Typical Value, -3dB)

– Low Noise: MAS3012-2≤1.0μgrms/√Hz

– Non-linearity: 0.1%FS (Full Range)

– Extremely Reliable in Harsh Environment

– Wide Operating Temperature Range: -40~+85ºC

MS3012 MEMS accelerometer adopts advanced production craft, and fully calibrated, which assured that our products have real actual precise and perfect performance.

  1. Aerospace Level Reliability, 12-step Strictest Quality Control

We have advanced product test team and measurement equipment, and we cherish the quality as the life of the company, all our products must pass the strictest quality control procedures, our unique 12-step quality control assures our products enjoy top level quality.

  1. Competitive Price, ODM supported

With strict cost control and massive production, we can provide the most competitive cost-effective prices, and we have abundant ODM service experience for customers around the world, that is why we can build up long term win-win cooperation with our customers.

  1. Successful Applications in 10+ Fields, 1000+ Customers are Using

We are continuously focusing on MEMS measurement & control technologies, and have developed the most advanced MEMS accelerometer MS3012. and MS3012 has been widely used in High-speed Train, Early Earthquake Warning System, Structural Health Monitoring, Vibration Monitoring System, Inertial Navigation System, Platform Stability, etc. and now more than 1000 customers are using our MEMS accelerometer around the world.

  1. World-class Production Line, Fast Delivery

We have the world class production line to assure that the production procedures are scientific, precise, and normative, which also can assure our products to be fast delivered.

  1. Service with Heart, Professional Technical Support

We have the professional technical support engineer team, which can provide 24-hour technical support and excellent after-sale service.

Serving customers with heart is the principle of SkyMEMS, Customer demand is the fundamental driving force of our development.

We treat our customers with heart, customers’ satisfaction is the direction and target of SkyMEMS. Through continuously technology innovation and service upgrading, we will realize win-win cooperation with customers.




Q: What does the MEMS accelerometer measure?

A: An accelerometer is an electromechanical device that measures acceleration forces. These forces may be static, like the constant force of gravity pulling at our feet, or they could be dynamic – caused by moving or vibrating the accelerometer. They developed MEMS (micro electromechanical systems) accelerometers.

Q: What is MEMS accelerometer?

A: MEMS stands for micro electro mechanical system and applies to any sensor manufactured using microelectronic fabrication techniques. These techniques create mechanical sensing structures of microscopic size, typically on silicon. When coupled with microelectronic circuits, MEMS sensors can be used to measure physical parameters such as acceleration. There are two types of MEMS accelerometers: variable capacitive and piezoresistive. Variable capacitive (VC) MEMS accelerometers are lower range, high sensitivity devices used for structural monitoring and constant acceleration measurements. Piezoresistive (PR) MEMS accelerometers are higher range, low sensitivity devices used in shock and blast applications.

Q: How about the delivery time?

A: for our standard model, if we have them in stock, only need 2~3days to re-test before shipping, if it is out of stock, then need around 2 weeks to arrange the production and tests. For the ODM electronic product, if needing to modify the structure, it will need around 3~4 weeks to arrange the production and tests.

Q: How to arrange the payment?

A: about the payment, please pay to our company account, the beneficiary’s name: NANJING SKY MEMS TECHNOLOGY CO., LTD.  And our email is only to contact with u formally. To notice this to avoid the loss.