A MEMS accelerometer measures linear acceleration using a microscopic proof mass suspended on silicon springs: when the device accelerates, the mass shifts, changing an electrical property (usually capacitance) that is converted into an acceleration signal. Built with Micro-Electro-Mechanical Systems technology, these sensors are small, low-power, and low-cost, and are used everywhere from smartphones to seismic monitoring. SkyMEMS produces capacitive MEMS accelerometers with bias stability down to the µg level.
What Is a MEMS Accelerometer?
A MEMS accelerometer is a sensor that measures acceleration — including static acceleration such as gravity and dynamic acceleration such as vibration or motion. “MEMS” refers to how it is built: a tiny mechanical structure etched onto a silicon chip. Compared with older piezoelectric or mechanical accelerometers, MEMS devices are far smaller, cheaper, and lower-power.
How Does a MEMS Accelerometer Work?
- Inside the sensor, a proof mass is suspended on microscopic silicon springs.
- When the device accelerates, the proof mass lags behind and shifts position.
- This displacement changes the capacitance between the mass and fixed electrodes (in a capacitive MEMS accelerometer).
- The circuit converts the capacitance change into a voltage or digital signal proportional to the acceleration.
Because gravity is a constant acceleration, a MEMS accelerometer can also sense tilt — which is why it forms the basis of inclinometers and IMUs.
What Are the Types of MEMS Accelerometer?
| Type | Sensing method | Typical use |
|---|---|---|
| Capacitive | Capacitance change from proof-mass motion | Most industrial & precision sensing |
| Piezoresistive | Resistance change under strain | High-shock, wide bandwidth |
| Analog output | Continuous voltage output | Simple integration |
| Digital output | Digital (SPI/I²C/RS-485) | Direct system integration |
Capacitive MEMS accelerometers are the most common for precision applications. SkyMEMS examples include the closed-loop MA1000A capacitive MEMS accelerometer and the MAS1000H analog MEMS accelerometer.
MEMS Accelerometer vs Piezoelectric Accelerometer
A MEMS accelerometer can measure static acceleration (like gravity) and low-frequency motion, is small and low-cost, and integrates easily. A piezoelectric accelerometer only measures dynamic (changing) acceleration but handles very high frequencies and shock. For a detailed comparison, see the difference between MEMS and piezo accelerometers.
What Is a MEMS Accelerometer Used For?
- Consumer electronics — screen rotation, motion sensing, step counting
- Industrial — machine condition and vibration monitoring
- Automotive — airbag deployment, ABS, stability control
- Structural & seismic — earthquake detection and structural health monitoring, using dedicated seismic accelerometers
Browse the full MEMS accelerometer range for specific models.
Frequently Asked Questions
What is a MEMS accelerometer? A MEMS accelerometer is a silicon-based sensor that measures linear acceleration — both static (gravity) and dynamic (motion/vibration) — using a microscopic proof mass, in a small, low-power, low-cost package.
How does a MEMS accelerometer work? A proof mass suspended on silicon springs shifts when the device accelerates. In a capacitive MEMS accelerometer this changes the capacitance between the mass and fixed electrodes, which is converted into an acceleration signal.
What is the difference between a MEMS and a piezoelectric accelerometer? A MEMS accelerometer measures static and low-frequency acceleration and is small and low-cost; a piezoelectric accelerometer measures only dynamic acceleration but handles very high frequencies and shock.
Can a MEMS accelerometer measure tilt? Yes. Because gravity is a constant acceleration, a MEMS accelerometer can sense tilt angle, which is the basis of MEMS inclinometers.
What is a MEMS accelerometer used for? Consumer electronics, industrial vibration monitoring, automotive safety systems, and seismic/structural monitoring.
